JPH0385649U - - Google Patents
Info
- Publication number
- JPH0385649U JPH0385649U JP14702389U JP14702389U JPH0385649U JP H0385649 U JPH0385649 U JP H0385649U JP 14702389 U JP14702389 U JP 14702389U JP 14702389 U JP14702389 U JP 14702389U JP H0385649 U JPH0385649 U JP H0385649U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- protrusion
- suction head
- suction surface
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920006015 heat resistant resin Polymers 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000009719 polyimide resin Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14702389U JPH0385649U (en]) | 1989-12-22 | 1989-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14702389U JPH0385649U (en]) | 1989-12-22 | 1989-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0385649U true JPH0385649U (en]) | 1991-08-29 |
Family
ID=31693557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14702389U Pending JPH0385649U (en]) | 1989-12-22 | 1989-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0385649U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011027547A1 (ja) * | 2009-09-07 | 2011-03-10 | 村田機械株式会社 | 基板移載装置 |
-
1989
- 1989-12-22 JP JP14702389U patent/JPH0385649U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011027547A1 (ja) * | 2009-09-07 | 2011-03-10 | 村田機械株式会社 | 基板移載装置 |